Active Vibration Isolation

Bilz Vibration Technology AG

Active Vibration Isolation

Real-time vibration control for the most demanding applications.

Active vibration isolation systems use high-performance real-time control in up to six degrees of freedom, for the highest requirements in isolation performance, settling time and level constancy.

Typical applications include semiconductor production, nanotechnology and ultra-sensitive measurement and imaging equipment.

Series available

  • Active vibration isolation system AIS™
  • Active table platform e-stable mini

Typical applications

  • Semiconductor & nanotech
  • Electron microscopy
  • Ultra-precise metrology